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½ºÆÛÅÍ ÁõÂø±â(Pt)

Àåºñ¸í ½ºÆÛÅÍ ÁõÂø±â(Pt)
¸ðµ¨¸í Q300T
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E-mail wndus93@snu.ac.kr
ÀÌ¿ë·á 30,000¿ø/ȸ

1) ¿ø¸® ¹× ±â´É
½ºÆÛÅÍÁõÂø±â´Â Áø°ø»óÅ¿¡¼­ Àü¾ÐÀ» °¡ÇÏ¿© Ÿ°Ù¹°Áú°ú ±âÆÇ»çÀÌ¿¡ Àü±âÀåÀ» Çü¼ºÇÕ´Ï´Ù. À̷κÎÅÍ ¾Æ¸£°ï±âü°¡ ÀÌ¿ÂÈ­µÇ¸é¼­ ÇöóÁ°¡ Çü¼ºµÇ°í ÀÌ¿ÂÈ­µÈ ¾Æ¸£°ïºÐÀڴ Ÿ°ÙÇ¥¸é°ú Ãæµ¹ÇÏ¿© Ÿ°Ù¹°ÁúÀ» Áõ¹ß½Ãŵ´Ï´Ù. ¹æÃâµÈ Ÿ°Ù¹°ÁúÀÌ ±âÆÇ¿¡ ÁõÂøµÇ¾î nmµÎ²²ÀÇ ¾ãÀº ¹Ú¸·À» Çü¼ºÇÕ´Ï´Ù.

 

2) ±â±âÈ°¿ë
- ÁÖ»çÀüÀÚÇö¹Ì°æ(SEM)½ÃÆíÄÚÆÃ
- ¼¾¼­¹× 3dÇÁ¸°Æà ºÎÀ¯¸¶½ºÅ© Á¦ÀÛÀ» À§ÇÑ ¾ãÀº Àüµµ¼º ¹Ú¸·Çü¼º

 

3) »ç¾ç
- Targetmaterial:Pt(Au,Cr,Iralsopossible, butnotusingnow)
- Targetsize:57mm Ø
- Sizeofspecimenstage:2",3",4” wafersize
- Rotationspeed:14rpm<speed<38rpm
- Pumpingspeed:5m^3/hr
- Workchambersize:300mmdiameterX127mmhigh
- Instrumentweight:45kg
- Turbopump:70L/secaircooled
   Rotarypump:50L/minpumpwithoilmistfilter
- SputterVacuumrange:5×〖10〗^(-3)  mbar<pressure<5×〖10〗^(-2)  mbar
- Depositioncurrent:0-150mA
- Gas:Ar,99.999%(5psi)

 

4) Àåºñȸ»çȨÆäÀÌÁö
https://www.quorumtech.com/


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